Optimization of Focused Ion Beam-Tomography for Superconducting Electronics

Superconducting electronics play an important role in quantum computation, ultra-low-power electronics, voltage standards and magnetic sensors. Many of these applications rely on the microfabrication of superconducting circuits with multiple wiring layers and a range of active elements. The performance of these superconducting circuits are directly related to the three-dimensional microstructures of these wiring layers and active elements. Focused-ion-beam tomography is an ideal tool for exploring this microstructure, however the processes of milling, imaging, and reconstruction must be optimized for the information most pertinent to superconducting electronics. We present the optimization of tomographic collection and reconstruction using the NIST designed 10 V Programmable Josephson Voltage Standard (PJVS).